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Proceedings Paper

Analysis of the elastic mechanism for contact scanning probe
Author(s): Rui-Jun Li; Sheng Tao; Kuang-Chao Fan
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Paper Abstract

High precision contact scanning probes for measuring miniature components on micro- and nano-coordinate measuring machines require elastic mechanisms. In order to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe, the elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper. The contact scanning probe is composed of a fiber stylus with a ball tip, a mechanism of floating plate suspended by four leaf springs, and two optical sensors. The leaf springs experience elastic deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results verify the correctness of the analysis.

Paper Details

Date Published: 31 January 2013
PDF: 9 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87590M (31 January 2013); doi: 10.1117/12.2014421
Show Author Affiliations
Rui-Jun Li, Hefei Univ. of Technology (China)
Sheng Tao, Hefei Univ. of Technology (China)
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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