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Proceedings Paper

Visualization of interior structures with nanoscale resolution using ultrasonic-atomic force microscopy
Author(s): Dong Ryul Kwak; Sun Hee Kim; Ik Keun Park; Judith A. Todd; Chiaki Miyasaka
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Paper Abstract

Ultrasonic-Atomic Force Microscopy (U-AFM) was applied to determine the feasibility of visualizing interior features in an ultra-thin film system. As the amplitude and phase of the cantilever resonance frequency changes with local contact stiffness, U-AFM can obtain both surface and subsurface topographic and elastic images. Specimens with nanostructured silicon dioxide (SiO2) patterns deposited on silicon (111) surfaces were fabricated and covered with polymethyl methacrylate (PMMA) films with thicknesses of 800 nm and 1400 nm, respectively. While subsurface features were barely distinguishable beneath the 1400 nm film, 100 nm SiO2 features were clearly visualized for PMMA film thicknesses below and up to 800 nm. This research demonstrates the potential of U-AFM as a powerful technique for visualizing nanoscale subsurface features in microelectronic devices.

Paper Details

Date Published: 9 April 2013
PDF: 9 pages
Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 869117 (9 April 2013); doi: 10.1117/12.2012244
Show Author Affiliations
Dong Ryul Kwak, Seoul National Univ. of Science and Technology (Korea, Republic of)
Sun Hee Kim, Seoul National Univ. of Science and Technology (Korea, Republic of)
Ik Keun Park, Seoul National Univ. of Science and Technology (Korea, Republic of)
Judith A. Todd, Pennsylvania State Univ. (United States)
Chiaki Miyasaka, Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 8691:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
Vijay K. Varadan, Editor(s)

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