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Proceedings Paper

A novel nano-scaled force sensor based on silicon photonic crystal
Author(s): Tianlong Li; Longqiu Li; Wenping Song; Guangyu Zhang; Yao Li
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Paper Abstract

With advantages of ultra-compact size, high resolution, and easy integration, nano-scaled force sensors based on photonic crystal are widely used in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The performances of these nano-scaled force sensors are mainly determined by the shape nanocavity. The principle of the sensor is that the output wavelength of the force sensor using photonic crystal varies as a function of force and pressure. In this work, a novel three dimensional nano-scaled force sensor based on silicon photonic crystal, in which a nanocavity is embedded in an S-shaped elastic body, is provided and studied numerically. The advantage of this force sensor is that it can be used in the NEMS to measure the component force in the X direction, Y direction and Z direction, simultaneously. The relationship between the force and the output wavelength is determined using finite element method (FEM) and finite difference time-domain method (FDTD).

Paper Details

Date Published: 9 April 2013
PDF: 8 pages
Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86911G (9 April 2013); doi: 10.1117/12.2012157
Show Author Affiliations
Tianlong Li, Harbin Institute of Technology (China)
Longqiu Li, Harbin Institute of Technology (China)
Wenping Song, Harbin Institute of Technology (China)
Guangyu Zhang, Harbin Institute of Technology (China)
Yao Li, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 8691:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
Vijay K. Varadan, Editor(s)

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