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Proceedings Paper • Open Access

Front Matter: Volume 8466
Author(s): Proceedings of SPIE

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume XXXX, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

Paper Details

Date Published: 13 November 2012
PDF: 10 pages
Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 846601 (13 November 2012); doi: 10.1117/12.2011781
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Proceedings of SPIE, SPIE (United States)


Published in SPIE Proceedings Vol. 8466:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Michael T. Postek; Victoria A. Coleman; Ndubuisi G. Orji, Editor(s)

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