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Proceedings Paper

Sidewall profile control through processing and dye additives
Author(s): Eitan Shalom; Donald W. Johnson; Kelly Hale; Terry Pebbles; William B. Curtis
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Paper Details

Date Published: 1 June 1990
PDF: 18 pages
Proc. SPIE 1262, Advances in Resist Technology and Processing VII, (1 June 1990); doi: 10.1117/12.20115
Show Author Affiliations
Eitan Shalom, MacDermid Inc. (Israel)
Donald W. Johnson, MacDermid Inc. (United States)
Kelly Hale, MacDermid Inc. (United States)
Terry Pebbles, MacDermid Inc. (United States)
William B. Curtis, MacDermid Inc. (United States)

Published in SPIE Proceedings Vol. 1262:
Advances in Resist Technology and Processing VII
Michael P. C. Watts, Editor(s)

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