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Proceedings Paper

Automatic alignment of double optical paths in excimer laser amplifier
Author(s): Dahui Wang; Xueqing Zhao; Hengqi Hua; Yongsheng Zhang; Yun Hu; Aiping Yi; Jun Zhao
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Paper Abstract

A kind of beam automatic alignment method used for double paths amplification in the electron pumped excimer laser system is demonstrated. In this way, the beams from the amplifiers can be transferred along the designated direction and accordingly irradiate on the target with high stabilization and accuracy. However, owing to nonexistence of natural alignment references in excimer laser amplifiers, two cross-hairs structure is used to align the beams. Here, one crosshair put into the input beam is regarded as the near-field reference while the other put into output beam is regarded as the far-field reference. The two cross-hairs are transmitted onto Charge Coupled Devices (CCD) by image-relaying structures separately. The errors between intersection points of two cross-talk images and centroid coordinates of actual beam are recorded automatically and sent to closed loop feedback control mechanism. Negative feedback keeps running until preset accuracy is reached. On the basis of above-mentioned design, the alignment optical path is built and the software is compiled, whereafter the experiment of double paths automatic alignment in electron pumped excimer laser amplifier is carried through. Meanwhile, the related influencing factors and the alignment precision are analyzed. Experimental results indicate that the alignment system can achieve the aiming direction of automatic aligning beams in short time. The analysis shows that the accuracy of alignment system is 0.63μrad and the beam maximum restoration error is 13.75μm. Furthermore, the bigger distance between the two cross-hairs, the higher precision of the system is. Therefore, the automatic alignment system has been used in angular multiplexing excimer Main Oscillation Power Amplification (MOPA) system and can satisfy the requirement of beam alignment precision on the whole.

Paper Details

Date Published: 16 May 2013
PDF: 7 pages
Proc. SPIE 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 879625 (16 May 2013); doi: 10.1117/12.2011273
Show Author Affiliations
Dahui Wang, Northwest Institute of Nuclear Technology (China)
Xueqing Zhao, Northwest Institute of Nuclear Technology (China)
Hengqi Hua, Northwest Institute of Nuclear Technology (China)
Yongsheng Zhang, Northwest Institute of Nuclear Technology (China)
Yun Hu, Northwest Institute of Nuclear Technology (China)
Aiping Yi, Northwest Institute of Nuclear Technology (China)
Jun Zhao, Northwest Institute of Nuclear Technology (China)


Published in SPIE Proceedings Vol. 8796:
2nd International Symposium on Laser Interaction with Matter (LIMIS 2012)
Stefan Kaierle; Jingru Liu; Jianlin Cao, Editor(s)

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