Share Email Print

Proceedings Paper

Illumination pupilgram control using an intelligent illuminator
Author(s): Noriyuki Hirayanagi; Yasushi Mizuno; Masakazu Mori; Naonori Kita; Ryota Matsui; Tomoyuki Matsuyama
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Nikon’s Intelligent Illuminator, a freeform pupilgram generator, realizes a high flexibility for pupilgram control by using more than 10,000 degrees-of-freedom for pupilgram adjustment. In this work, an Intelligent Illuminator was integrated into an ArF scanner, the Nikon NSR-S621D. We demonstrate the pupilgram setting accuracy by direct correlation between on-body measured pupilgram and desired target pupilgram. We show that the Intelligent Illuminator is used for fine tuning of the pupilgram to match optical proximity effect (OPE) characteristics. We experimentally confirmed that a global source optimization software realized an improvement of lithographic process window without changing OPE characteristics by using optimized pupilgram made by Intelligent Illuminator.

Paper Details

Date Published: 12 April 2013
PDF: 10 pages
Proc. SPIE 8683, Optical Microlithography XXVI, 86830D (12 April 2013); doi: 10.1117/12.2011077
Show Author Affiliations
Noriyuki Hirayanagi, Nikon Corp. (Japan)
Yasushi Mizuno, Nikon Corp. (Japan)
Masakazu Mori, Nikon Corp. (Japan)
Naonori Kita, Nikon Corp. (Japan)
Ryota Matsui, Nikon Corp. (Japan)
Tomoyuki Matsuyama, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 8683:
Optical Microlithography XXVI
Will Conley, Editor(s)

© SPIE. Terms of Use
Back to Top