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Proceedings Paper

The optical properties of different temperature deposited ZnS film in visible to near-infrared region
Author(s): Ming Zhou; Dingquan Liu; Tianyan Yu; Qingyuan Cai
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Paper Abstract

In this paper, Zinc Sulfide (ZnS) single-layer films were deposited on Germanium (Ge) substrate by thermal evaporation with film thickness about 1600 nm, and deposition temperature were 115°C, 155°C and 230°C. Reflective index of Ge substrate and ZnS film were measured by infrared spectroscopy and Spectroscopic Ellipsometry (SE). Additionally, Scanning Electron Microscopy (SEM) was used to observe the thin film structure graphics. The experiment results indicate that the prepared conditions have a great influence on optical constants of film, appropriately increase the deposition temperature will be helpful for increasing the packing density, and the refractive index is closely related to the surface micro-structure of film.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 84192W (15 October 2012); doi: 10.1117/12.2011005
Show Author Affiliations
Ming Zhou, Shanghai Institute of Technical Physics (China)
Dingquan Liu, Shanghai Institute of Technical Physics (China)
Tianyan Yu, Shanghai Institute of Technical Physics (China)
Qingyuan Cai, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 8419:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy
Yadong Jiang; Zhifeng Wang; Junsheng Yu, Editor(s)

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