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Proceedings Paper

Chemical risk in early design (C-RED)
Author(s): Carlton Washburn; Katie Grantham
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Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, ; doi: 10.1117/12.2010672
Show Author Affiliations
Carlton Washburn, Missouri University of Science and Technology (United States)
Katie Grantham, Missouri University of Science and Technology (United States)


Published in SPIE Proceedings Vol. 8682:
Advances in Resist Materials and Processing Technology XXX
Mark H. Somervell, Editor(s)

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