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Proceedings Paper

Free volume and viscosity effects in polymer layers: application to lithographic processes
Author(s): Patrick Jean Paniez; Michel J. Pons; Olivier P. Joubert
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Paper Abstract

Due to the numerous hydroxyl groups present in Novolaks and PHS, large amounts of free volume are created during the spin coating process. The free volume variations can be observed using plasma etching techniques along with laser interferometry. The concept of free volume allows a clearer description of the bake process. The detection of free volume implies a better understanding of its role in the various steps of the lithographic process. Several applications of this technique are presented.

Paper Details

Date Published: 1 June 1990
PDF: 10 pages
Proc. SPIE 1262, Advances in Resist Technology and Processing VII, (1 June 1990); doi: 10.1117/12.20103
Show Author Affiliations
Patrick Jean Paniez, CNET-CNS (France)
Michel J. Pons, CNET-CNS (France)
Olivier P. Joubert, CNET-CNS (France)


Published in SPIE Proceedings Vol. 1262:
Advances in Resist Technology and Processing VII
Michael P. C. Watts, Editor(s)

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