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Proceedings Paper

Multi-stacked silicon wire waveguides and couplers toward 3D optical interconnects
Author(s): J. Kang; N. Nishiyama; Y. Atsumi; T. Amemiya; S. Arai
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Paper Abstract

The relationship between the propagation loss and roughness on multi-layered Si waveguides fabricated up to a 3rd layer was investigated. By reducing the surface and sidewall roughness of the waveguides, a low propagation loss of 3.7 dB/cm for the 3 layer a-Si:H waveguides was demonstrated. Furthermore, vertical coupling between multilayer waveguides was demonstrated by use of a grating-type vertical coupler. A coupling efficiency of 22% was obtained for 10 pairs of gratings with a period of 640 nm, even with a layer distance of 1μm.

Paper Details

Date Published: 27 February 2013
PDF: 12 pages
Proc. SPIE 8630, Optoelectronic Interconnects XIII, 863008 (27 February 2013); doi: 10.1117/12.2009456
Show Author Affiliations
J. Kang, Tokyo Institute of Technology (Japan)
N. Nishiyama, Tokyo Institute of Technology (Japan)
Y. Atsumi, Tokyo Institute of Technology (Japan)
T. Amemiya, Tokyo Institute of Technology (Japan)
S. Arai, Tokyo Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 8630:
Optoelectronic Interconnects XIII
Alexei L. Glebov; Ray T. Chen, Editor(s)

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