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Proceedings Paper

Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing
Author(s): Tao Peng; Johan Moulin; Yann Le Bihan; Francisco Alves
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Paper Abstract

The detection of deep-lying small defects using eddy current non-destructive testing (NDT) involves high spatial resolution and AC field measurement capability. For this purpose multilayered Finemet®/Copper/Finemet magneto-impedance microsensors were elaborated by microfabrication process. The films were deposited separately by sputtering using bi-layers lift-off method. A post-annealing step was achieved under magnetic field, which led to induce a transversal anisotropy in the magnetic films. A method based on double amplitude demodulation was proposed for the AC sensitivity characterization. A sensitivity of 2100 V/T/A has been measured and the sensors presented no hysteresis since a DC bias field larger than anisotropy field is applied. In addition, the sensors sensitivity remains constant up to 1 kHz.

Paper Details

Date Published: 9 April 2013
PDF: 9 pages
Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86910O (9 April 2013); doi: 10.1117/12.2009341
Show Author Affiliations
Tao Peng, Lab. de Génie Électrique de Paris, CNRS, Univ. Paris Sud (France)
CNRS, Institut d'Électronique Fondamentale, Univ. Paris Sud (France)
Johan Moulin, CNRS, Institut d'Électronique Fondamentale, Univ. Paris Sud (France)
Yann Le Bihan, Lab. de Génie Électrique de Paris, CNRS, Univ. Paris Sud (France)
Francisco Alves, Lab. de Génie Électrique de Paris, CNRS, Univ. Paris Sud (France)


Published in SPIE Proceedings Vol. 8691:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013
Vijay K. Varadan, Editor(s)

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