Share Email Print
cover

Proceedings Paper

Progress toward mid-IR chip-scale integrated-optic TDLAS gas sensors
Author(s): Michael B. Frish; Raji Shankar; Irfan Bulu; Ian Frank; Matthew C. Laderer; Richard T. Wainner; Mark G. Allen; Marko Lončar
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We are building prototype chip-scale low-power integrated-optic gas-phase chemical sensors based on mid-infrared (3-5μm) Tunable Diode Laser Absorption Spectroscopy (TDLAS). TDLAS is able to sense many gas phase chemicals with high sensitivity and selectivity. Novel gas sensing elements using low-loss resonant photonic crystal cavities or waveguides will permit compact integration of a laser source, sampling elements, and detector in configurations suitable for inexpensive mass production. Recently developed Interband Cascade Lasers (ICLs) that operate at room temperature with low power consumption are expected to serve as monochromatic sources to probe the mid-IR molecular spectral transitions. Practical challenges to fabricating these sensors include: a) selecting and designing the high-Q microresonator sensing element appropriate for the selected analyte; b) coupling laser light into and out of the sensing element; and c) device thermal management, especially stabilizing laser temperature with the precision needed for sensitive spectroscopic detection. This paper describes solutions to these challenges.

Paper Details

Date Published: 4 February 2013
PDF: 8 pages
Proc. SPIE 8631, Quantum Sensing and Nanophotonic Devices X, 86310E (4 February 2013); doi: 10.1117/12.2008953
Show Author Affiliations
Michael B. Frish, Physical Sciences Inc. (United States)
Raji Shankar, Harvard Univ. (United States)
Irfan Bulu, Harvard Univ. (United States)
Ian Frank, Harvard Univ. (United States)
Matthew C. Laderer, Physical Sciences Inc. (United States)
Richard T. Wainner, Physical Sciences Inc. (United States)
Mark G. Allen, Physical Sciences Inc. (United States)
Marko Lončar, Harvard Univ. (United States)


Published in SPIE Proceedings Vol. 8631:
Quantum Sensing and Nanophotonic Devices X
Manijeh Razeghi, Editor(s)

© SPIE. Terms of Use
Back to Top