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Proceedings Paper

A process for low cost wire grid polarizers
Author(s): M. P. C. Watts; M. Little; E. Egan; A. Hochbaum; C. Johns; S. Stephansen
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Paper Abstract

Oblique angle metal deposition has been combined with high aspect ratio imprinted structures to create wire grid polarizers (WGP’s) for use as polarization recyclers in liquid crystal displays. The process of oblique deposition was simulated to determine optimal feature profile and deposition geometry. The optical results for the oblique deposition WGP show contrast comparable to a conventionally etched WGP. The next steps to the fabrication of meter sized WGP are proposed.

Paper Details

Date Published: 26 March 2013
PDF: 9 pages
Proc. SPIE 8680, Alternative Lithographic Technologies V, 86802C (26 March 2013); doi: 10.1117/12.2008924
Show Author Affiliations
M. P. C. Watts, Agoura Technology (United States)
M. Little, Agoura Technology (United States)
E. Egan, Agoura Technology (United States)
A. Hochbaum, Agoura Technology (United States)
C. Johns, Agoura Technology (United States)
S. Stephansen, Agoura Technology (United States)

Published in SPIE Proceedings Vol. 8680:
Alternative Lithographic Technologies V
William M. Tong, Editor(s)

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