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Proceedings Paper

Gallium nitride on silicon for consumer and scalable photonics
Author(s): C. Bayram; K. T. Shiu; Y. Zhu; C. W. Cheng; D. K. Sadana; Z. Vashaei; E. Cicek; R. McClintock; M. Razeghi
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Paper Abstract

Gallium Nitride (GaN) is a unique material system that has been heavily exploited for photonic devices thanks to ultraviolet-to-terahertz spectral tunability. However, without a cost effective approach, GaN technology is limited to laboratory demonstrations and niche applications. In this investigation, integration of GaN on Silicon (100) substrates is attempted to enable widespread application of GaN based optoelectronics. Controlled local epitaxy of wurtzite phase GaN on on-axis Si(100) substrates is demonstrated via metal organic chemical vapor deposition (MOCVD). CMOScompatible fabrication scheme is used to realize [SiO2-Si{111}-Si{100}] groove structures on conventional 200-mm Si(100) substrates. MOCVD growth (surface treatment, nucleation, initiation) conditions are studied to achieve controlled GaN epitaxy on such grooved Si(100) substrates. Scanning electron microscopy and transmission electron microscopy techniques are used to determine uniformity and defectivity of the GaN. Our results show that aforementioned groove structures along with optimized MOCVD growth conditions can be used to achieve controlled local epitaxy of wurtzite phase GaN on on-axis Si(100) substrates.

Paper Details

Date Published: 4 February 2013
PDF: 7 pages
Proc. SPIE 8631, Quantum Sensing and Nanophotonic Devices X, 863112 (4 February 2013); doi: 10.1117/12.2008788
Show Author Affiliations
C. Bayram, IBM Research, T. J. Watson Research Ctr. (United States)
K. T. Shiu, IBM Research, T. J. Watson Research Ctr. (United States)
Y. Zhu, IBM Research, T. J. Watson Research Ctr. (United States)
C. W. Cheng, IBM Research, T. J. Watson Research Ctr. (United States)
D. K. Sadana, IBM Research, T. J. Watson Research Ctr. (United States)
Z. Vashaei, Northwestern Univ. (United States)
E. Cicek, Northwestern Univ. (United States)
R. McClintock, Northwestern Univ. (United States)
M. Razeghi, Northwestern Univ. (United States)


Published in SPIE Proceedings Vol. 8631:
Quantum Sensing and Nanophotonic Devices X
Manijeh Razeghi, Editor(s)

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