Share Email Print
cover

Proceedings Paper

Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator
Author(s): Yongchun Zhong; Jie Ma; Kam Sing Wong; Zhe Chen; Jianying Zhou
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phasecontrolled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic waveguide were fabricated. The uniform area is up to 4 mm2, and tens of waveguide have been introduced in the one dimension and two dimension PC structure. This technique gives rise to a substantial reduction of the fabrication complexity and a significant improvement on the accuracy of the functional defects in photonic crystals. This method can also been used to design and fabricate metamaterials.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181F (15 October 2012); doi: 10.1117/12.2008759
Show Author Affiliations
Yongchun Zhong, Hong Kong Univ. of Science and Technology (Hong Kong, China)
Jinan Univ. (China)
Jie Ma, Jinan Univ. (China)
Kam Sing Wong, Hong Kong Univ. of Science and Technology (Hong Kong, China)
Zhe Chen, Jinan Univ. (China)
Jianying Zhou, Sun Yat-Sen Univ. (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Xiangang Luo; Xiaoyi Bao; Song Hu; Yanqiu Li, Editor(s)

© SPIE. Terms of Use
Back to Top