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Proceedings Paper

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power
Author(s): Mohammad J. Moghimi; Chris Wilson; David L. Dickensheets
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Paper Abstract

A MEMS deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror, while direct electrostatic actuation creates a concave surface. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process and results are presented.

Paper Details

Date Published: 5 March 2013
PDF: 9 pages
Proc. SPIE 8617, MEMS Adaptive Optics VII, 861707 (5 March 2013); doi: 10.1117/12.2008440
Show Author Affiliations
Mohammad J. Moghimi, Montana State Univ. (United States)
Chris Wilson, Bridger Photonics, Inc. (United States)
David L. Dickensheets, Montana State Univ. (United States)


Published in SPIE Proceedings Vol. 8617:
MEMS Adaptive Optics VII
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

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