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Proceedings Paper

Electrical measurements of overlay using the Prometrix Lithomap LM20
Author(s): David Martin
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Paper Abstract

New test structures for the electrical measurement of overlay using the Prometrix Lithomap LM2O have been designed. These have been extensively used to assess the performance of Canon FPA 1550 step-and--repeat alignment instruments. Results indicate that 98 % of the measured sites are within alignment tolerance of +1- 0.4 microns.

Paper Details

Date Published: 1 June 1990
PDF: 12 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20081
Show Author Affiliations
David Martin, Plessey Semiconductors Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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