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Proceedings Paper

Ultraviolet-visible microspectrophotometer system for small-spot measurement and characterization of thin films
Author(s): Vincent J. Coates; Warren Lin; Rodney P. Johnson; Dennis Paull
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Paper Details

Date Published: 1 June 1990
PDF: 3 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20076
Show Author Affiliations
Vincent J. Coates, Nanometrics Inc. (United States)
Warren Lin, Nanometrics Inc. (United States)
Rodney P. Johnson, Nanometrics Inc. (United States)
Dennis Paull, Nanometrics Inc. (United States)


Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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