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Proceedings Paper

Low-voltage scanning electron metrology
Author(s): Harry L. Coleman
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Paper Abstract

This paper deals with the problems of using a low voltage scanning electron beam in a measurement instrument. Consideration shall be given to surface charging and thin film materials, condenser and objective lenses, filaments, scanning coil design, scan generation systems, detectors, and outputs.The measurement of geometries, methods of determining geometry edges, resolution, magnification, focus, depth of focus, image rotation, and staging necessary to locate the geometry to be measured will also be discussed. Data are presented from fundamental research.

Paper Details

Date Published: 1 June 1990
PDF: 10 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20067
Show Author Affiliations
Harry L. Coleman, Raytheon Co. (United States)

Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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