Share Email Print
cover

Proceedings Paper

Reliability of MEM relays for zero leakage logic
Author(s): Yenhao Chen; Rhesa Nathanael; Jack Yaung; Louis Hutin; Tsu-Jae King Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Micro-electro-mechanical (MEM) relays are an intriguing alternative to transistors for ultra-low-power digital logic applications [1]. This paper investigates various failure modes for logic relays. Experimental results are presented to show that structural fatigue, dielectric charging, and contact stiction are not reliability-limiting issues. Contact resistance instability caused by surface oxidation and contamination is the primary challenge, and can be influenced by device design and operating conditions.

Paper Details

Date Published: 9 March 2013
PDF: 7 pages
Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 861404 (9 March 2013); doi: 10.1117/12.2005719
Show Author Affiliations
Yenhao Chen, The Univ. of California, Berkeley (United States)
Rhesa Nathanael, Xilinx, Inc. (United States)
Jack Yaung, The Univ. of California, Berkeley (United States)
Louis Hutin, The Univ. of California, Berkeley (United States)
Tsu-Jae King Liu, The Univ. of California, Berkeley (United States)


Published in SPIE Proceedings Vol. 8614:
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
Rajeshuni Ramesham; Herbert R. Shea, Editor(s)

© SPIE. Terms of Use
Back to Top