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Proceedings Paper

A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng; Ramam Akkipeddi; Xiaosong Tang; Siew Lang Teo; Yee Cheong Loke
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Paper Abstract

In this paper, we demonstrate a novel split-ladder photonic crystal cavity, which can be tuned across a very large wavelength range by an on-chip integrated nano-electromechanical actuator. The nano-electromechanical actuator is used to control the cavity’s central gap. When the cavity gap is widened, the resonance wavelength is blue-shifted correspondingly. The dimensions of the proposed split-ladder cavity are designed by 3D Finite-difference time-domain (FDTD) calculations. We fabricated and tested the devices. Experimental results show that the optomechanical coupling coefficient of the second order resonance mode is about 80 GHz/nm. In addition, there is a relatively linear relationship between the resonance shift and the gap change. The maximum measured resonance wavelength shift is about 17 nm, corresponding to a cavity central gap increase of 26 nm.

Paper Details

Date Published: 13 March 2013
PDF: 7 pages
Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160Q (13 March 2013); doi: 10.1117/12.2005606
Show Author Affiliations
Feng Tian, National Univ. of Singapore (Singapore)
Guangya Zhou, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)
Jie Deng, A*STAR Institute of Materials Research and Engineering (Singapore)
Ramam Akkipeddi, A*STAR Institute of Materials Research and Engineering (Singapore)
Xiaosong Tang, A*STAR Institute of Materials Research and Engineering (Singapore)
Siew Lang Teo, A*STAR Institute of Materials Research and Engineering (Singapore)
Yee Cheong Loke, A*STAR Institute of Materials Research and Engineering (Singapore)


Published in SPIE Proceedings Vol. 8616:
MOEMS and Miniaturized Systems XII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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