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Proceedings Paper

A custom CMOS imager for multi-beam laser scanning microscopy and an improvement of scanning speed
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Paper Abstract

Multi-beam laser scanning confocal microscopy with a 256 × 256-pixel custom CMOS imager performing focal-plane pinhole effect, in which any rotating disk is not required, is demonstrated. A specimen is illuminated by 32 × 32 diffraction limited light spots whose wavelength and pitch are 532nm and 8.4 μm, respectively. The spot array is generated by a microlens array, which is scanned by two-dimensional piezo actuator according to the scanning of the image sensor. The frame rate of the prototype is 0.17 Hz, which is limited by the actuator. The confocal effect has been confirmed by comparing the axial resolution in the confocal imaging mode with that of the normal imaging mode. The axial resolution in the confocal mode measured by the full width at half maximum (FWHM) for a planar mirror was 8.9 μm, which is showed that the confocality has been achieved with the proposed CMOS image sensor. The focal-plane pinhole effect in the confocal microscopy with the proposed CMOS imager has been demonstrated at low frame rate. An improvement of the scanning speed and a CMOS imager with photo-sensitivity modulation pixels suitable for high-speed scanning are also discussed.

Paper Details

Date Published: 19 February 2013
PDF: 6 pages
Proc. SPIE 8659, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV, 865905 (19 February 2013); doi: 10.1117/12.2004965
Show Author Affiliations
Min-Woong Seo, Shizuoka Univ. (Japan)
Keiichiro Kagawa, Shizuoka Univ. (Japan)
Keita Yasutomi, Shizuoka Univ. (Japan)
Shoji Kawahito, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 8659:
Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV
Ralf Widenhorn; Antoine Dupret, Editor(s)

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