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Proceedings Paper

Micro-hole drilling with femtosecond fiber laser
Author(s): Huan Huang; Lih-Mei Yang; Jian Liu
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Paper Abstract

Femtosecond (fs) laser becomes more popular in precise material procesing due to the limited heat affected zone (HAZ) over longer laser pulses. In this paper, micro-hole drilling in ambient air with fs fiber laser at 1030 nm is presented. Micro holes were fabricated in both transparent (polymer and glass), and non-transparent materials (metal and tissue). A scanning electron microscopy is used to investigate the hole quality. Both percusiion drilling and trepanning drilling methods were evaluated and compared. High quality micro holes with no visible micro-cracks were demonstrated. Micro-hole drilling in hard and soft tissues with no collateral thermal damage is observed. This study can be extended to MEMS, microfluidic, and micro surgery applications.

Paper Details

Date Published: 13 March 2013
PDF: 9 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070K (13 March 2013); doi: 10.1117/12.2004888
Show Author Affiliations
Huan Huang, PolarOnyx, Inc. (United States)
Lih-Mei Yang, PolarOnyx, Inc. (United States)
Jian Liu, PolarOnyx, Inc. (United States)


Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)

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