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Proceedings Paper

Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices
Author(s): Harish Subbaraman; Xiaochuan Xu; John Covey; Ray T. Chen
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Paper Abstract

We demonstrate efficient coupling of light into silicon nanomembrane (SiNM) based photonic devices using a subwavelength grating (SWG) coupler. Our designed 17.1 μm x 10 μm grating couplers are fabricated at the input and the output of 8 mm x 2.5 μm SiNM waveguides on a glass substrate. A high coupling efficiency of 39.2% is achieved at a wavelength of 1555.56 nm. The 1-dB and 3-dB bandwidths are measured to be 29 nm and 57 nm, respectively. Peak efficiency variation of 0.26 dB is observed from a measurement of 5 grating pairs. Such grating couplers open limitless possibilities for the development of high performance nanomembrane based photonic devices.

Paper Details

Date Published: 27 February 2013
PDF: 6 pages
Proc. SPIE 8630, Optoelectronic Interconnects XIII, 86301C (27 February 2013); doi: 10.1117/12.2004707
Show Author Affiliations
Harish Subbaraman, Omega Optics, Inc. (United States)
Xiaochuan Xu, The Univ. of Texas at Austin (United States)
John Covey, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 8630:
Optoelectronic Interconnects XIII
Alexei L. Glebov; Ray T. Chen, Editor(s)

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