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Proceedings Paper

Micro-structuring of thin titanium films with ultrashort laser pulses
Author(s): Regina Moser; Tobias Gschwilm; Adrian Zacherle; Gerhard Heise; Heinz P. Huber; Gerd Marowsky
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Paper Abstract

Electron beam guns with approximately 10 kW power are used for drying printing colors. As exit window for the electrons, 15 μm thin Titanium films are used, their thickness is at the current limit for industrial rolling processes. Thinner exit windows would increase the electron’s transmission and therefore reduce the required acceleration voltage, power consumption, shielding against X-rays and in the end machine and processing costs. The Titanium films should locally be thinned to about 5 μm, in the ranges of 3 mm diameter. Ultra-short laser pulses are well known for high precision micro structuring, as they offer small heat effect zones. We optimized the processing parameters and the ultra-short laser ablation of thin Titanium foils to achieve high manufacturing velocity and quality of the surface structure. Experiments with single pulse laser ablation and different spot diameter were conducted to find a connection between spot diameter and ablation threshold. The experiments show no dependency of the thresholds on the laser spot diameter.. First Experiments with different parameters were conducted to structure a three dimensional geometry in thin Titanium foils.

Paper Details

Date Published: 15 March 2013
PDF: 6 pages
Proc. SPIE 8611, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIII, 86111A (15 March 2013); doi: 10.1117/12.2004552
Show Author Affiliations
Regina Moser, Munich Univ. of Applied Sciences (Germany)
Tobias Gschwilm, Munich Univ. of Applied Sciences (Germany)
Adrian Zacherle, Munich Univ. of Applied Sciences (Germany)
Gerhard Heise, Munich Univ. of Applied Sciences (Germany)
Heinz P. Huber, Munich Univ. of Applied Sciences (Germany)
Gerd Marowsky, Laser Lab. Göttingen (Germany)


Published in SPIE Proceedings Vol. 8611:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIII
Alexander Heisterkamp; Peter R. Herman; Michel Meunier; Stefan Nolte, Editor(s)

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