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Proceedings Paper

Quantitative measures for surface texture description in semiconductor wafer inspection
Author(s): A. Ravishankar Rao; Ramesh C. Jain
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Paper Details

Date Published: 1 June 1990
PDF: 9 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20043
Show Author Affiliations
A. Ravishankar Rao, IBM/Thomas J. Watson Research (United States)
Ramesh C. Jain, Univ. of Michigan/Ann Arbor (United States)


Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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