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Proceedings Paper

Top-flat and top-patterned cone gratings for mid-infrared antireflective properties
Author(s): Jean-Baptiste Brückner; Judikaël Le Rouzo; Ludovic Escoubas; François Flory; Jean-Jacques Simon; Gérard Berginc
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Paper Abstract

Achieving a broadband antireflection property from material surfaces is one of the highest priorities for those who want to improve the efficiency of solar cells or the sensitivity of photo-detectors. To lower the reflectance of a surface, we have decided to study the optical response of a top-flat cone shaped silicon grating, based on previous work exploring pyramid gratings.

Through rigorous numerical methods, such as Finite Different Time Domain or Rigorous Coupled-Wave Analysis, we then designed several structures theoretically demonstrating an antireflective character within the middle infrared region. From the opto-geometrical parameters such as period, depth and shape of the pattern determined by numerical analysis, these structures have been fabricated using controlled slope plasma etching processes. Afterwards, optical characterizations of several samples were carried out. The reflectance of the grating in the near and middle infrared domains has been measured by Fourier Transform Infrared spectrometry and a comparison with numerical analysis has been made.

As expected, those structures offer a fair antireflective character in the region of interest. Further numerical investigations led to the fact that patterning the top of the cone could enlarge the antireflective domain to the visible region. Thus, as with the simple cone grating, a comparison of the numerical analysis with the experimental measurements is made. Finally, diffracted orders are studied and compared between both structures. Those orders are critical and must be limited as one wants to avoid crosstalk phenomena in imaging systems.

Paper Details

Date Published: 14 March 2013
PDF: 12 pages
Proc. SPIE 8619, Physics and Simulation of Optoelectronic Devices XXI, 86190U (14 March 2013); doi: 10.1117/12.2004299
Show Author Affiliations
Jean-Baptiste Brückner, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS (France)
Judikaël Le Rouzo, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS (France)
Ludovic Escoubas, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS (France)
François Flory, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS (France)
Jean-Jacques Simon, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS (France)
Gérard Berginc, Thales Optronique S.A. (France)


Published in SPIE Proceedings Vol. 8619:
Physics and Simulation of Optoelectronic Devices XXI
Bernd Witzigmann; Marek Osinski; Fritz Henneberger; Yasuhiko Arakawa, Editor(s)

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