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Proceedings Paper

Widely tunable singlemode surface micro-machined MEMS-VCSELs operating at 1.95μm
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Paper Abstract

We present surface micro-machined micro-electro mechanical-system (MEMS) tunable vertical-cavity surfaceemitting lasers (VCSEL) with rectangular and triangular shaped quantum wells (QWs) emitting around 1:95 μm predestined for broadband tunable diode laser absorption spectroscopy. The VCSELs show single-mode operation and high side-mode suppression-ratio SMSR < 50 dB within the whole tuning range of 50nm and 35 nm, the fibre-coupled optical power of 1:0mW and 1:76mW and the threshold current of 2:5mA and 2:0mA for the rectangular and triangular shaped QWs respectively. The 3 dB modulation frequency of the MEMS is 110 Hz.

Paper Details

Date Published: 13 March 2013
PDF: 7 pages
Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390C (13 March 2013); doi: 10.1117/12.2004257
Show Author Affiliations
Karolina Zogal, Technische Univ. Darmstadt (Germany)
Tobias Gruendl, Walter Schottky Institut (Germany)
Christian Gierl, Technische Univ. Darmstadt (Germany)
Sujoy Paul, Technische Univ. Darmstadt (Germany)
Christian Grasse, Walter Schottky Institut (Germany)
Peter Meissner, Technische Univ. Darmstadt (Germany)
Marcus-Christian Amann, Walter Schottky Institut (Germany)
Franko Kueppers, Technische Univ. Darmstadt (Germany)


Published in SPIE Proceedings Vol. 8639:
Vertical-Cavity Surface-Emitting Lasers XVII
Kent D. Choquette; James K. Guenter, Editor(s)

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