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Proceedings Paper

Sub-ns and ps laser performance and results
Author(s): J. Kilmer; M. Terraciano; Y. Yin
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Paper Abstract

In the field of ablative-based material processing there is a desire to use short pulse width (subns) laser sources. If the pulse width is too long <10 ns the processing is fast, but crude. If the pulse width is too short <10 ps the processing is precise, but slow. In an effort to balance the process fidelity with material removal rate, a unique TEM00 mode quality sub-ns (~0.5 ns nominal pulse width) laser was developed.

Paper Details

Date Published: 13 March 2013
PDF: 12 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86071K (13 March 2013); doi: 10.1117/12.2004206
Show Author Affiliations
J. Kilmer, Photonics Industries International, Inc. (United States)
M. Terraciano, Photonics Industries International, Inc. (United States)
Y. Yin, Photonics Industries International, Inc. (United States)


Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)

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