
Proceedings Paper
Sub-ns and ps laser performance and resultsFormat | Member Price | Non-Member Price |
---|---|---|
$14.40 | $18.00 |
![]() |
GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. | Check Access |
Paper Abstract
In the field of ablative-based material processing there is a desire to use short pulse width (subns) laser sources. If the pulse width is too long <10 ns the processing is fast, but crude. If the pulse width is too short <10 ps the processing is precise, but slow. In an effort to balance the process fidelity with material removal rate, a unique TEM00 mode quality sub-ns (~0.5 ns nominal pulse width) laser was developed.
Paper Details
Date Published: 13 March 2013
PDF: 12 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86071K (13 March 2013); doi: 10.1117/12.2004206
Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)
PDF: 12 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86071K (13 March 2013); doi: 10.1117/12.2004206
Show Author Affiliations
Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)
© SPIE. Terms of Use
