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Proceedings Paper

Periodically structured Silicon substrate by microsphere-assisted laser interactions
Author(s): K. L. N. Deepak; D. Grojo; L. Charmasson; P. Delaporte; O. Utéza
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Paper Abstract

Laser near-field enhancements underneath transparent microspheres can be used to locally implement new functionalities in materials. Using this technique, we report micro- and nano-structuration on silicon (Si). The Langmuir-Blodgett (LB) technique is primarily used to realize monolayers of C18 functionalized silica (SiO2) microspheres on a large size area of the substrates. Afterwards, by irradiating the deposited monolayer with single shot UV nanosecond laser pulses in the ablation regime, we demonstrate the formation of dense arrays of craters in silicon substrate. In particular, we describe our works to obtain mono dispersed craters of sub micrometer size using LB technique and taking the fluence and sphere size as variable process parameters. Finite-difference time-domain (FDTD) simulations are presented to estimate the enhancement intensity factor and near-field distribution below the spheres in the experiments.

Paper Details

Date Published: 22 February 2013
PDF: 6 pages
Proc. SPIE 8608, Laser-based Micro- and Nanopackaging and Assembly VII, 860803 (22 February 2013); doi: 10.1117/12.2004169
Show Author Affiliations
K. L. N. Deepak, Lasers, Plasmas et Procédés Photoniques, CNRS, Aix Marseille Univ. (France)
D. Grojo, Lasers, Plasmas et Procédés Photoniques, CNRS, Aix Marseille Univ. (France)
L. Charmasson, Lasers, Plasmas et Procédés Photoniques, CNRS, Aix Marseille Univ. (France)
P. Delaporte, Lasers, Plasmas et Procédés Photoniques, CNRS, Aix Marseille Univ. (France)
O. Utéza, Lasers, Plasmas et Procédés Photoniques, CNRS, Aix Marseille Univ. (France)


Published in SPIE Proceedings Vol. 8608:
Laser-based Micro- and Nanopackaging and Assembly VII
Udo Klotzbach; Yongfeng Lu; Kunihiko Washio, Editor(s)

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