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Proceedings Paper

Free-standing monolithic LiNbO3 photonic crystal slabs
Author(s): Jun Deng; Sudheer Kumar Vanga; Sajid Hussian; Hongwei Gao; Soon Thor Lim; Ching Eng Png; Xiang Ning; Andrew A. Bettiol; Aaron J. Danner
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Paper Abstract

In this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO3 photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO3. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89°. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO3 structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO3 is needed.

Paper Details

Date Published: 21 February 2013
PDF: 7 pages
Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320H (21 February 2013); doi: 10.1117/12.2004085
Show Author Affiliations
Jun Deng, National Univ. of Singapore (Singapore)
A*STAR Institute of High Performance Computing (Singapore)
Sudheer Kumar Vanga, National Univ. of Singapore (Singapore)
Sajid Hussian, National Univ. of Singapore (Singapore)
Hongwei Gao, National Univ. of Singapore (Singapore)
Soon Thor Lim, A*STAR Institute of High Performance Computing (Singapore)
Ching Eng Png, A*STAR Institute of High Performance Computing (Singapore)
Xiang Ning, National Univ. of Singapore (Singapore)
Andrew A. Bettiol, National Univ. of Singapore (Singapore)
Aaron J. Danner, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 8632:
Photonic and Phononic Properties of Engineered Nanostructures III
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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