Share Email Print
cover

Proceedings Paper

Fiber profilometer for measurement of hard-to-access areas
Author(s): Zhuang Liu; Xia Yu; Qi Jie Wang; Shaw Wei Kok; Ying Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.

Paper Details

Date Published: 22 February 2013
PDF: 6 pages
Proc. SPIE 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 86030Z (22 February 2013); doi: 10.1117/12.2003784
Show Author Affiliations
Zhuang Liu, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Nanyang Technological Univ. (Singapore)
Xia Yu, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Qi Jie Wang, Nanyang Technological Univ. (Singapore)
Shaw Wei Kok, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Ying Zhang, A*STAR Singapore Institute of Manufacturing Technology (Singapore)


Published in SPIE Proceedings Vol. 8603:
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II
Friedhelm Dorsch, Editor(s)

© SPIE. Terms of Use
Back to Top