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Proceedings Paper

A 19-element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator
Author(s): Weimin Wang; Fenggang Tao; Qiang Wang; Chuankai Qiu; Zexiang Chen; Jun Yao
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Paper Abstract

A 19 element segmented MEMS deformable mirror(DM) based on electrostatic repulsive-force actuator is proposed and fabricated using a commercial surface micromachining process PolyMUMPs. Impacts of different sizes of actuator on DM’s characterizations such as stroke, work bandwidth, driving voltage and fill factor are analyzed and optimized. An analytical analysis combined numerical simulation has been performed on the deformation of repulsive flexural beam actuator regarding actuator size and boundary condition. These analytic insights could provide guidelines for future MEMS DMs optimum design. A maximum stroke of the fabricated DM is 2.6μm, is larger than 2μm for the sacrificial layer thickness of PolyMUMPs. The preliminary aberration correction of the whole DM array is also analyzed. Compared to conventional MEMS DMs, this design demonstrates the advantage of large stroke over a standard surface micromachining fabrication process with a thin deposited layer, and it would expand the application of MEMS DMs in adaptive optics.

Paper Details

Date Published: 5 March 2013
PDF: 10 pages
Proc. SPIE 8617, MEMS Adaptive Optics VII, 861702 (5 March 2013); doi: 10.1117/12.2003017
Show Author Affiliations
Weimin Wang, Institute of Optics and Electronics (China)
Univ. of Electronic Science and Technology of China (China)
Univ. of Chinese Academy of Sciences (China)
Fenggang Tao, Institute of Optics and Electronics (China)
Qiang Wang, Institute of Optics and Electronics (China)
Chuankai Qiu, Institute of Optics and Electronics (China)
Zexiang Chen, Univ. of Electronic Science and Technology of China (China)
Jun Yao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8617:
MEMS Adaptive Optics VII
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

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