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Proceedings Paper

Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures
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Paper Abstract

Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide (ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby providing the effective optical constants.

Paper Details

Date Published: 21 February 2013
PDF: 7 pages
Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320I (21 February 2013); doi: 10.1117/12.2002827
Show Author Affiliations
Akram A. Khosroabadi, College of Optical Sciences, The Univ. of Arizona (United States)
R. A. Norwood, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 8632:
Photonic and Phononic Properties of Engineered Nanostructures III
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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