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Proceedings Paper

A continuous single-crystal-silicon membrane deformable mirror using bimorph spring
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Paper Abstract

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

Paper Details

Date Published: 5 March 2013
PDF: 7 pages
Proc. SPIE 8617, MEMS Adaptive Optics VII, 861704 (5 March 2013); doi: 10.1117/12.2002785
Show Author Affiliations
Tong Wu, Tohoku Univ. (Japan)
Takashi Sasaki, Tohoku Univ. (Japan)
Masayuki Akiyama, Tohoku Univ. (Japan)
Kazuhiro Hane, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 8617:
MEMS Adaptive Optics VII
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

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