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Proceedings Paper

Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge
Author(s): E. A. Bugaev; Anatoli I. Fedorenko; V. V. Kondratenko; E. N. Zubarev
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Paper Abstract

Annealing effects in short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B+C) and CrB2/C were studied in wide temperature range approximately equals 200-1200 degree(s)C by X-ray scattering and cross-sectional microscopy. It was shown that thermodynamic equilibrium of layers materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.

Paper Details

Date Published: 23 January 1995
PDF: 11 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200278
Show Author Affiliations
E. A. Bugaev, Kharkov Polytechnical Institute (Ukraine)
Anatoli I. Fedorenko, Kharkov Polytechnical Institute (Ukraine)
V. V. Kondratenko, Kharkov Polytechnical Institute (Ukraine)
E. N. Zubarev, Kharkov Polytechnical Institute (Ukraine)


Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science
Alexander V. Vinogradov, Editor(s)

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