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Proceedings Paper

Investigation of surface and superthin layers using x-ray methods
Author(s): Igor Fedorovich Mikhailov; Svetlana Serafimovn Borisova; Larisa Petrovna Fomina; I. N. Babenko
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Paper Abstract

Methods of X-ray optics, X-ray structure and fluorescence analysis were applied for superthin (3-100 angstrom) films investigation. The way of surface relief statistic characteristics determination by comparison of model calculations with experimental X-ray reflection curves is proposed. Surface Fourier-spectra were reconstructed by scattering indicatrices. The original method of X-ray analysis in grazing beam has been applied to films as thin as 15 angstrom. The results of investigation of film phase composition, density and microroughness in the stage of island growth and continuous layer formation in deposited metals Ni, Ti, Nb are discussed from the point of view of their different abilities for oxidation. The trend to strict constancy of nuclei height beginning with four monatomic layers has been found. Niobium films consisting of two- and three-layers of oxides and niobium solid solution (Nb-O) may be continuous already at 20 angstrom thickness. In titanium films at 15 angstrom thickness the transition from island state to continuous bilayer Ti/TiO2 have been revealed.

Paper Details

Date Published: 23 January 1995
PDF: 30 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200274
Show Author Affiliations
Igor Fedorovich Mikhailov, Kharkov Polytechnical Institute (Ukraine)
Svetlana Serafimovn Borisova, Kharkov Polytechnical Institute (Ukraine)
Larisa Petrovna Fomina, Kharkov Polytechnical Institute (Ukraine)
I. N. Babenko, Kharkov Polytechnical Institute (Ukraine)


Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science
Alexander V. Vinogradov, Editor(s)

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