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Proceedings Paper

Peculiarities of x-ray scattering by thin-film roughness
Author(s): Albert Yu. Karabekov; Igor V. Kozhevnikov
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Paper Abstract

The expression for X-ray scattering diagram by thin film roughness is obtained and analyzed in the perturbation theory approximation. Specific features of X-ray scattering are discussed which have no analogs in X- ray scattering from a single surface and are caused by the interference effects. These are: oscillations of X-ray scattering diagram, the lack of X-ray scattering from external film surface, and interference suppression (up to some orders) of X-ray scattering intensity.

Paper Details

Date Published: 23 January 1995
PDF: 10 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200273
Show Author Affiliations
Albert Yu. Karabekov, P.N. Lebedev Physical Institute (Russia)
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science

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