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Proceedings Paper

X-ray investigations of supersmooth surfaces
Author(s): Igor V. Kozhevnikov; Victor E. Asadchikov; B. M. Alaudinov; Albert Yu. Karabekov; Alexander V. Vinogradov
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Paper Abstract

The possibilities of X-ray scattering methods are demonstrated for the quantitative study of supersmooth surface microgeometry. It is shown that the model of a surface which takes into account layered inhomogeneities near a surface enables one to obtain better agreement between theory and experiment in comparison with the step-like model of a surface which widely used elsewhere.

Paper Details

Date Published: 23 January 1995
PDF: 13 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200271
Show Author Affiliations
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)
Victor E. Asadchikov, Institute of Crystallography (Russia)
B. M. Alaudinov, Institute of Crystallography (Russia)
Albert Yu. Karabekov, P.N. Lebedev Physical Institute (Russia)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russia)

Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science
Alexander V. Vinogradov, Editor(s)

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