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Proceedings Paper

Edge-roughness determination and its contribution to CD measurement error in a scanning electron microscope
Author(s): Duane C. Holmes; J. Kevin McConathy
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Paper Details

Date Published: 1 June 1990
PDF: 9 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20027
Show Author Affiliations
Duane C. Holmes, Nanometrics, Inc. (United States)
J. Kevin McConathy, Nanometrics, Inc. (United States)


Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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