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Proceedings Paper

Whispering gallery optics for synchrotron radiation beam lines
Author(s): Igor V. Kozhevnikov
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Paper Abstract

Applications of the whispering gallery (WhG) optics for the steering of the synchrotron radiation (SR) are considered. The general principles of operation of the vertical SR beamline for proximity X-ray lithography are discussed. The possibilities of the WhG optics for the transportation of the SR beam to the second floor and for the steering of the hard X-ray radiation are analyzed.

Paper Details

Date Published: 23 January 1995
PDF: 15 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200267
Show Author Affiliations
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science
Alexander V. Vinogradov, Editor(s)

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