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Proceedings Paper

Structure and optical properties of multilayer x-ray mirrors for the long wavelength part (3.1-4.4 nm) of water window
Author(s): Anatoli I. Fedorenko; V. V. Kondratenko; Yurii P. Pershin; O. V. Poltseva; E. N. Zubarev; L. L. Balakireva; V. V. Didyk; V. V. Burtsev
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Paper Abstract

Structure and optical properties (at (lambda) equals 0.154 nm and (lambda) equals 3.16 nm) of W - Ti, W - TiN, W - Sc and Cr - Sc multilayer x-ray mirrors for the long wave part of 'water window' wavelength range were studied by methods of the x-ray diffractometry and cross-sectional electron microscopy. The reflectivities at (lambda) equals 0.154 nm are increased going from W - TiN, Cr - Sc, W - Ti to W - Sc multilayers. Cr - Sc mirrors have highest reflectivity and resolution at (lambda) equals 3.16 nm. Influence of the ambient atmosphere on optical properties of multilayer mirrors is shown.

Paper Details

Date Published: 23 January 1995
PDF: 10 pages
Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200265
Show Author Affiliations
Anatoli I. Fedorenko, Kharkov Polytechnical Institute (Ukraine)
V. V. Kondratenko, Kharkov Polytechnical Institute (Ukraine)
Yurii P. Pershin, Kharkov Polytechnical Institute (Ukraine)
O. V. Poltseva, Kharkov Polytechnical Institute (Ukraine)
E. N. Zubarev, Kharkov Polytechnical Institute (Ukraine)
L. L. Balakireva, P.N. Lebedev Physical Institute (Russia)
V. V. Didyk, Institute of Metallophysics (Ukraine)
V. V. Burtsev, Institute of Metallophysics (Ukraine)


Published in SPIE Proceedings Vol. 2453:
X-Ray Optics and Surface Science
Alexander V. Vinogradov, Editor(s)

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