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Proceedings Paper

Light confinement effect of non-spherical nanoscale solid immersion lenses
Author(s): Myun-Sik Kim; Toralf Scharf; David Nguyen; Ethan Keeler; Skyler Rydberg; Wataru Nakagawa; Gaël Osowecki; Hans Peter Herzig; Reinhard Voelkel
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Paper Abstract

We report on the light confinement effect observed in non-ideally shaped (i.e., non-spherical) nanoscale solid immersion lenses (SILs). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these non-circular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that non-ideal SILs exhibit a spot size reduction comparable to that of spherical SILs. When the SIL size is wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in shape implies a large tolerance in nano-SIL fabrication.

Paper Details

Date Published: 5 March 2013
PDF: 7 pages
Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131B (5 March 2013); doi: 10.1117/12.2002145
Show Author Affiliations
Myun-Sik Kim, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
SUSS MicroOptics SA (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
David Nguyen, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Ethan Keeler, Montana State Univ. (United States)
Skyler Rydberg, Montana State Univ. (United States)
Wataru Nakagawa, Montana State Univ. (United States)
Gaël Osowecki, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Hans Peter Herzig, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)


Published in SPIE Proceedings Vol. 8613:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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