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Proceedings Paper

Ultrathin GaN membranes for MEMS/NEMS applications
Author(s): Ion M Tiginyanu; Veaceslav Popa; Marion A. Stevens-Kalceff
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Paper Details

Date Published:
Proc. SPIE 8625, Gallium Nitride Materials and Devices VIII, ; doi: 10.1117/12.2001561
Show Author Affiliations
Ion M Tiginyanu, Institute of Electronic Engineering and Nanotechnologies, Academy of Sciences of Moldova (Moldova)
Veaceslav Popa, National Center for Materials Study and Testing, Technical University of Moldova (Moldova)
Marion A. Stevens-Kalceff, School of Physics, University of New South Wales (Australia)

Published in SPIE Proceedings Vol. 8625:
Gallium Nitride Materials and Devices VIII
Jen-Inn Chyi; Yasushi Nanishi; Hadis Morkoç; Joachim Piprek; Euijoon Yoon; Hiroshi Fujioka, Editor(s)

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