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Proceedings Paper

ZnO:Al with tuned properties for photovoltaic applications: thin layers and high mobility material
Author(s): Florian Ruske; Robert Rößler; Mark Wimmer; Steffi Schönau; Stefan Kämpfer; Max Hendrichs; Sebastian Neubert; Lars Korte; Bernd Rech
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Paper Abstract

TCO films are crucial components of almost all thin-film solar cells and a-Si:H/c-Si heterojunction solar cells. As they are used as front contacts, the requirements for electrical conductivity and optical trnamission are generally very high. Further restrictions are imposed onto the deposition process by the cell manufacturing process, in which e.g. the maximum substrate temperature can be limited. In this paper the optimization of ZnO:Al layer deposited by magnetron sputtering to different solar cells is discussed. For a-Si:H/c-Si heterojunction solar cells the advantages and limitations of different variations of magnetron sputtering of ZnO:Al are discussed and compared to standard ITO deposition. For a-Si:H/μc-Si:H the usage of post-deposition treatments to improve the optical and electrical performance is briefly discussed.

Paper Details

Date Published: 18 March 2013
PDF: 9 pages
Proc. SPIE 8626, Oxide-based Materials and Devices IV, 86260Y (18 March 2013); doi: 10.1117/12.2001290
Show Author Affiliations
Florian Ruske, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Robert Rößler, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Mark Wimmer, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Steffi Schönau, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Stefan Kämpfer, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Max Hendrichs, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Sebastian Neubert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Lars Korte, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Bernd Rech, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)


Published in SPIE Proceedings Vol. 8626:
Oxide-based Materials and Devices IV
Ferechteh Hosseini Teherani; David C. Look; David J. Rogers, Editor(s)

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