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Proceedings Paper

Sintering of solution-based aluminum nano-particles by laser ignition
Author(s): Jie Zhang
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Paper Abstract

We investigated self-propagating sintering of aluminum (Al) nano-particles (NPs) induced by laser ignition on inkderived films. An organic Al-NP ink was used as the precursor. A CW IR fiber laser (1064nm, IPG YLR-50 series with the maximum power of 50W) was used as the sintering source. Electrically-conductive Al wires were successfully processed on glass and silicon substrates, respectively. The sintered Al wire shows lower resistivity (~32μΩ·cm) on the glass substrate and higher resistivity (~150μΩ·cm) on the silicon substrate. N2 ambient helps to reduce electric resistivity by reducing oxidation. In addition to the sintering procedure and recipe, the sintered wires were characterized using a two-point probe, a scanning electric microscopy and a laser scanning microscopy. The laser heating process was simulated. We also discussed the mechanism of laser ignited sintering.

Paper Details

Date Published: 13 March 2013
PDF: 10 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 860704 (13 March 2013); doi: 10.1117/12.2001140
Show Author Affiliations
Jie Zhang, Panasonic Boston Lab. (United States)


Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)

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