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Proceedings Paper

Design and theoretical investigation of nanograting for XUV outcoupler
Author(s): Ying-Ying Yang; Wei Sun; Ling Zhang; Huai-Juan Yu; Xue-Chun Lin
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Paper Abstract

We have theoretically investigated and optimized a nano-periodical highly-efficient blazed grating, which is used as an outcoupler for extreme-ultraviolet (XUV) radiation. The rigorous coupled-wave analysis (RCWA) with S matrix method is employed to optimize the parameters of the grating. The grating is designed to be etched on top layers of IR reflector, performs as a highly-reflective mirror for IR light and highly-efficient outcoulper for XUV. The diffraction efficiency of -1 order of this XUV outcoupler is greater than 20% in the range near 60 nm, which allows high resolution spectroscopy of the 1s-2s transition in He+ at around 60 nm with extreme precision. The theoretical calculations are verified by the experimental results.

Paper Details

Date Published: 26 November 2012
PDF: 8 pages
Proc. SPIE 8557, Optical Design and Testing V, 855727 (26 November 2012); doi: 10.1117/12.2001123
Show Author Affiliations
Ying-Ying Yang, Institute of Semiconductors (China)
Wei Sun, Institute of Semiconductors (China)
Ling Zhang, Institute of Semiconductors (China)
Huai-Juan Yu, Institute of Semiconductors (China)
Xue-Chun Lin, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 8557:
Optical Design and Testing V
Yongtian Wang; Chunlei Du; Hong Hua; Kimio Tatsuno; H. Paul Urbach, Editor(s)

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