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Proceedings Paper

Absolute measurement of optical surface profile with a Fizeau interferometer
Author(s): Osami Sasaki; Akihiro Watanabe; Samuel Choi; Takamasa Suzuki
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Paper Abstract

An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.

Paper Details

Date Published: 20 November 2012
PDF: 7 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630B (20 November 2012); doi: 10.1117/12.2000145
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Akihiro Watanabe, Niigata Univ. (Japan)
Samuel Choi, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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