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Proceedings Paper

Role of diode lasers in metrology
Author(s): Kris Muthukrishnan
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Paper Abstract

The field of noncontact metrology is maturing as the video camera based and the laser probe based measurements are finding wide acceptance in the fields of semiconductor, micro electronics, disk drive, biomedical, chemical and aerospace industries. Some manufactures of conventional touch-probe based CMMs (Coordinated Measuring Machines) have started integrating video cameras and laser probes to compliment the measurements made by the touch-probe. The delicate nature of the parts and the extremely small feature sizes have fuelled the growing need for the multisensor technology to be incorporated into a single coordinate measuring machine. The laser probes compliment the video based metrology systems in providing the dynamic Z-height capabilities due to their faster data rate and increased resolution and accuracy. This paper highlights the pros and cons of different diode laser based sensors, drawn from the experience of applying them for measurements in different fields.

Paper Details

Date Published: 4 January 1995
PDF: 12 pages
Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); doi: 10.1117/12.198681
Show Author Affiliations
Kris Muthukrishnan, Pacific Precision Labs. Inc. (United States)


Published in SPIE Proceedings Vol. 2349:
Industrial Optical Sensors for Metrology and Inspection
Kevin G. Harding; H. Philip Stahl, Editor(s)

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